High-frequency measuring instrument
RF measurement device / Capable of high-precision measurement of RF inside the chamber
- Measurement is possible with an accuracy of 1%. - Measurement is possible with a time resolution of 1μs. - Measurement is possible for multiple frequencies, not just a single frequency (Ocye Poly Octiv Suite). - Ion flux can be measured (Octiv Suite).
- 企業：マツボー
- 価格：Other
